Vacuum chamber
Movable mounting table
Optical accessible via 3 windows
Feedthroughs: 4 x 50-pin D-Sub, 2 x MIL-DTL-5015
Vacuum limit [mbar]: <10 E-5
Type:
Service
Specimen length [mm]:
600.0
Specimen width/dia [mm]:
600.0
Specimen height/thk [mm]:
600.0
Data acquisition:
NI PXI
Keywords:
Vacuum, testing, Aachen, RWTH, Germany
